PECVD deposition machine DLC800

Overview
Compact DLC coating equipment for small-batch wear-resistant and low-friction coating production. Huasheng DLC800 is a compact DLC coating machine designed for small-batch industrial coating production. It combines magnetron sputtering (MS) and PECVD technology to deposit Cr/WC/a-C:H DLC coatings with low friction, high wear resistance, smooth surface quality, and strong coating adhesion.

Key features

• Compact chamber design to minimize footprint and support flexible small-batch workflows.
• MS + PECVD hybrid coating process for Cr/WC/a-C:H DLC films with smooth morphology and consistent film structure.
• Plasma cleaning and SET etching to improve substrate–coating adhesion.
• Automated process control, modular components and accessible maintenance for simplified operation.

Performance highlights

• Typical coating thickness: 2–4 µm
• Low friction coefficient: ≤0.1
• Coating hardness: ≈2500 HV
• Typical deposition temperature: <200°C

Product Parameters
Model No.: DLC800
Coating Technology: MS + PECVD
Etching: SET
Dimension: L4850 × W1600 × H2400 mm
Chamber volume: 0.8 m³
Effective Coating Area: Φ650 × 400 mm
Coating Deposition Temperature: <200°C
Capacity: Made-to-order
Max Loading Weight: 500 kg
Spindle Diameter: Φ170 mm
Processing Time: 6–8 h

Technical specifications

• Model: DLC800
• Coating: Cr/WC/a-C:H DLC (MS + PECVD)
• Typical thickness: 2–4 µm
• Friction coefficient: ≤0.1
• Hardness: ≈2500 HV
• Effective coating area: Φ650 × 400 mm
• Max loading weight: 500 kg
• Chamber volume: 0.8 m³
• Deposition temperature: <200°C
• Processing time per batch: 6–8 h