PECVD deposition machine DLC1500

Overview
DLC1500 is a large-capacity DLC coating machine designed for industrial mass production. It combines magnetron sputtering (MS) and PECVD technology to produce low-friction, wear-resistant DLC coatings with smooth surface quality and stable adhesion. With a 2 m³ chamber volume, larger effective coating area, and 1000 kg loading capacity, DLC1500 is suitable for manufacturers that require higher output and stable batch coating performance.

Key advantages

• Large-capacity production for industrial batch processing
• Low-friction, wear-resistant Cr/WC/a-C:H DLC coatings
• Smooth coating quality and reliable adhesion via plasma cleaning, transition layer deposition and DLC layer deposition
• Automated process control, larger chamber size and higher loading capacity for stable continuous production

DLC1500 Features

• Typical coating thickness: 2–4 μm
• High coating hardness: ≈2500 HV
• Large coating area
• Stable batch production
• Low friction coefficient

Product Parameter (table)
Model No.: DLC1500
Coating Technology: MS + PECVD
Etching: SET
Dimension: L4900 × W2000 × H2750 mm
Chamber volume: 2 m³
Effective Coating Area: Φ940 × 1000 mm
Coating Deposition Temperature: <200°C
Capacity: Made-to-order
Max Loading Weight: 1000 kg
Spindle Diameter: Max. Φ350 mm
Processing Time: 6–8 h

caractéristiques / spécifications techniques

• Model No.: DLC1500
• Coating Technology: MS + PECVD (magnetron sputtering + PECVD)
• Etching: SET
• Dimension (L × W × H): 4900 × 2000 × 2750 mm
• Chamber volume: 2 m³
• Effective Coating Area: Φ940 × 1000 mm
• Coating Deposition Temperature: <200°C
• Typical coating thickness: 2–4 μm
• Coating hardness: ≈2500 HV
• Max Loading Weight: 1000 kg
• Spindle Diameter (max): Φ350 mm
• Processing Time: 6–8 h per batch
• Capacity: Made-to-order / customizable (workpiece size, loading method, fixture design, coating requirements, production capacity, factory layout)