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Electric actuator LA-3 series
linearball screwservo-motor

Electric actuator - LA-3 series - Harmonic Drive LLC - linear / ball screw / servo-motor
Electric actuator - LA-3 series - Harmonic Drive LLC - linear / ball screw / servo-motor
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Characteristics

Type
electric
Movement
linear
Technology
ball screw, servo-motor
Motor
DC
Applications
test, for semiconductors
Other characteristics
precision, positioning
Stroke

10 mm, 30 mm
(0.394 in, 1.181 in)

Force

49 N

Speed

0.9 mm/s

Repeatability

0.1 µm

Description

A precision ball screw provides positioning accuracy better than 2 microns and repeatability of 0.1 microns. This product is ideal for measuring instruments, test and inspection systems, optical equipment, semiconductor and LCD manufacturing equipment. FEATURES: Max. driving force: 49N (5kgf) Resolution: 0.0174μm Stroke: 10mm, 30mm Maximum feed speed: 0.9mm/s Repeatability: ±0.1μm/1mm stroke Lost motion: 5μm/1mm stroke The drive motor can be changed to a stepping motor. INDUSTRIES: measuring instruments test and inspection systems optical equipment semiconductor LCD manufacturing equipment.

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Linear Actuators

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