Liquid evaporator VC-1420

thermalprocesscustom-made

The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system. HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need: A liquid mass flow meter for flow rate measurement, A high temperature mass flow controller for measurement of vapor flow rate, Valves, filters, heaters, etc. Features Compact size Can be installed in a variety of positions Best-selling TEOS vaporization system models Combines SEF or LF, and digital control is possible No need for a special bubbling tank or vaporization tank Line-up of DeviceNetTM model RoHS Compliance. Flow rate generated*1 (During TEOS generation) - Max. 5.0 CCM conversion (liquid phase conversion) Liquids supported - TEOS, P(OCH3)3, C6F6 Temperature rise - Max. 150°C Pressure generated*1 - Reduced pressure External leak integrity - 1.0x10-8Pa·m3/s Internal Leak Integrity - 1.0x10-6Pa·m3/s Wetted mateliar - 316L Stainless Steel ( polished surface ) Internal heater volume - AC 100V to 120V 70W(35Wx2) Temperature sensor used - Thermocouple K type (CA) Pressure Resistance - 1.0MPa（G） Standard Fitting Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female *1 Varies depending on the type of liquid. - *CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).