Thermal evaporator LSC

processfor liquids

HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit. Features High Flow Rate Gasification The LSC-A100 provides stable gasification of materials such as TEOS 600SCCM and H2O 2SLM All device maintenance can be performed at the front of the unit An optional PocketPC type PDA can be used to monitor the operating conditions of the LSC and to record and analyze operation logs. Flow rate generated - H2O 2SLM, TEOS 600 SCCM (Max.) Operating pressure - Max. 1.33kPa Source tank volume 2.7L Heat regulation method - PID control by the heat regulator Liquid surface detection method - Floating switch Internal mass flow controller Air pressure valve Bellows type Materials in liquid connection and gas contact area - SUS316L, PFA Operating Temperature - 20 to 35°C External input - Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option) External output Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option) Power source AC 100 V, single phase 50/60 Hz, 1.5 kVA Other