Huntsman manufactures low trace metal grade quaternary amines with a range of structures for semiconductor formulated cleaning, etching, or stripping applications. Huntsman quaternary amines offer a combination of low corrosion rates and ease of handling; they are available in higher concentrations than TMAH in both aqueous and non-aqueous solutions.
Photoresistor developer and stripping
Etch and removal
Photovoltaic texturization
Post chemical mechanical planarization cleans
Low trace metals, high purity
Available in concentrations up to 45%
Available in aqueous and non-aqueous solutions
E-GRADE® THEMAH is an aqueous solution of tris (hydroxyethyl) methylammonium hydroxide. It is a clear, high pH liquid with a mild odor and thermal stability. The product is primarily used in stripping and cleaning formulations in the semiconductor, display, and PCB industries.