XY positioning stage XY-OF-300x300J

rotarymotorizedelectric

Description
Open-frame low-profile XY-Rotary stage for wafer handling and precision automated positioning in semiconductor manufacturing. Side-mounted XY drive and large central through-hole on the rotary table provide unobstructed access to the wafer from both sides. Configurable for different apertures and travel ranges.

Key specifications

• XY stage model: XY-OF-300x300J
• Rotary stage model: ACR-335UT
• Aperture: 335 mm
• Stroke (X × Y): 300 × 300 mm
• Rotation: unlimited
• Linear resolution: standard 5 µm; optional 1 µm (with linear encoder)
• Rotary resolution: 1 arc-sec
• Load capacity: 20 kg
• Open center (through hole): 20 mm
• Velocity: up to 40 m/s (stepper), up to 80 m/s (servo)
• Angular velocity: 100 rpm
• Drive (XY): Ball screw
• Drive (rotary): Direct drive
• Motor options: stepper, servo, encoder

Performance and options

• High-precision positioning with optional 1 µm linear encoder
• Unlimited rotation with 1 arc-sec resolution for fine angular alignment
• Selectable motor and drive configurations to match speed or torque requirements
• Customizable aperture and travel to accommodate different wafer sizes and process tools

Applications

• Wafer handling and lithography alignment in semiconductor fabs
• Precision assembly, inspection and metrology
• Automated pick-and-place and testing equipment

Ordering information
Standard configuration includes the listed models and drives. Contact the supplier for custom aperture, travel ranges, encoder options and integration support.