The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.
Wide Spectral Range
The VUV-VASE covers wavelengths from below 140nm to 1700nm.
Utilizing our patented AutoRetarder®, the VUV-VASE guarantees accuracy for any sample measurement.
Convenient Sample Loading
Special design allows fast, efficient sample loading without contaminating system purge.
Protect Your Samples
The monochromator is placed before the sample to limit exposure of photosensitive materials.