Wafer edge measuring system WATOM 150/200mm

camera-basedautomatedprofilometer

Automated Wafer Edge Profiler WATOM 150/200mm Wafer Edge Measurement – Reliable Projection Technology WATOM CCD uses profile projection technology as an alternative to the LS technology and provides the ideal solution for less demanding profile measurement requirements, in particular when notch measurement is not required. A CMOS camera captures the profile image of the wafer edge illuminated by a telecentric light source. The modular design of WATOM is prepared to be combined with various automation solutions for modern semiconductor manufacturing processes, whether individual wafers are loaded manually or an automated material handling system (AMHS) is in place.