Wafer edge measuring system WATOM 200/300mm

opticallaserautomated

Automated Wafer Edge Profiler WATOM 200/300mm Wafer Edge Measurement - pinpoint precise The use of smaller and smaller patterns in the semiconductor industry calls for increasingly advanced materials of extremely high quality. In response to the steady improvements in the quality of wafers, KoCoS Optical Measurement has developed WATOM, a wafer edge and notch profile measurement tool which heralds a new era of extremely precise wafer geometry measurement. The patented measurement method of WATOM LS utilizes a lightsectioning sensor to measure the profile of the wafer edge with pinpoint precision, including the profile within the notch. Using a CMOS camera, pictures are taken of the laser line produced by the edge profile. A mathematical algorithm developed by KoCoS is then used to determine the edge profile characteristics. The modular design of WATOM is prepared to be combined with various automation solutions for modern semiconductor manufacturing processes, whether individual wafers are loaded manually or an automated material handling system (AMHS) is in place.