SEM sample preparation system EM ACE600

thin film making

The EM ACE600 sputter coater is a versatile high vacuum film deposition instrument for your FE-SEM and TEM applications. Whether you need to • - enhance contrast by a fine-grained metal layer, • - produce nanometer thin but robust carbon films, • - rotary shadow your sample to make smallest features visible, or to • - move into cryo-coating, the ACE600 coater will offer the optimal solution to see more, and this every time. Key Features What is in an ACE600 coater? The ACE600 offers the coating methods sputtering, carbon thread, carbon rod and e-beam evaporation. Up to two methods can be used at the same time in the same instrument. Additionally glow discharge can be performed by the instrument. This gives the flexibility to choose the best methods for the individual applications. This is realised with angled sources attached to a metal vacuum chamber and a rotating stage to allow evenly distributed films on a stage size over 100mm. Due to this set-up, a normal coater can be upgraded into a coater with a cryo-stage to perform freeze fracture application and connect to the Leica EM VCT500. Knowing what happens in the final step Precisely measured and stable parameters are they key to reproducible performance. The fully automated coating process ensures, that the conditions are the same for each run. Besides that, operation of the instrument is straight forward. A special solution of valves ensure an accurate and stable Argon pressure during sputter coating together with a quartz crystal thickness measurement in the middle of the stage, gives full control over the result.