White light interferometry profilometer MarSurf3D MS SX

3Dconfocalinterferometry

Overview
MarSurf3D MS SX Platform is a multisensor area-based 3D surface metrology system that combines confocal, white-light interferometry and focus variation in a single measuring head. The SX platform is optimized for small workpieces with axis/travel sizes up to 200 mm and enables surface analysis down to the lower nanometer range.

Key combined technologies
Confocal: Patented multi-pinhole confocal technology enables ultra-fast image capture with high signal quality and excellent repeatability across smooth to rough surfaces.

Interferometry: White-light interferometry provides sub-nanometer vertical resolution independent of magnification—ideal for very smooth surfaces and ultra-precise step-height measurement.

Focus variation: Focus-variation imaging is designed for geometry measurement of large, rough surfaces. It records steep inclines (up to ~86°) and delivers a large vertical measuring range in a single scan.

Typical measuring tasks

• Roughness measurements (ISO 21920 / ISO 4287 & ISO 13565 / ISO 25178)
• Topography and volume analysis (wear, tribology)
• Contour and form measurement (2D & 3D)
• Pore and particle analysis
• Defect detection
• Step heights and ultra-fine surface features down to the lower nanometer range

Maximum data quality
The system is designed to deliver high precision, accuracy, repeatability and reproducibility with full documentation for traceability and auditability. It provides quantitative measurement values suitable for engineering, product and process design and quality control.

Product value highlights

• Accurate, reproducible measurement: reliable recording of measurement data ensuring high raw data and profile accuracy.
• Wide range of workpieces: material-independent measurement for reflective, absorbent, opaque or transparent surfaces.
• Intuitive operation: guided user interface with automatic modes and measurement protocols for repeatable workflows.

Art. no. / Identification
Article number: 6350029

Technical specifications

• Denomination / product family: MarSurf3D MS SX Platform
• Brand: Mahr
• Article no.: 6350029
• Intended workpiece size: axis/travel sizes up to 200 mm
• Integrated measurement technologies: Confocal (multi-pinhole), White-light interferometry, Focus variation
• Vertical resolution: sub-nanometer range (interferometry level)
• Applicable surfaces: from very smooth (nm-scale) to very rough; records steep inclines up to ~86° (focus variation)
• Typical measurement tasks: roughness (ISO 21920 / ISO 4287, ISO 13565 / ISO 25178), topography, contour/form 2D & 3D, pore/particle analysis, defect detection, step height measurement
• User interface: guided automatic modes and measurement protocol support for repeatable operation
• Use case: area-based 3D surface metrology for small to medium workpieces, suitable for high-precision laboratory and production inspection