3D profilometer MarSurf3D MS GS

white light interferometryinterferometryconfocal

Product overview
Use the MarSurf3D MS GS Platform for high-precision 3D surface metrology on large workpieces. This multisensor system combines confocal, white light interferometry (WLI) and focus variation in one measuring head to cover smooth to very rough surfaces and steep inclinations with sub-nanometer vertical resolution where applicable. The GS platform is modular and designed for high throughput and continuous 24/7 operation with options for additional point sensors.

Key features

• Integrated multisensor head: confocal, white light interferometry, focus variation with active lighting.
• Versatile surface coverage: from ultra-smooth to very rough textures and steep slopes.
• Large measuring range and optimized portal design for big workpieces and automated workflows.
• Traceable measurement chain: focus on precision, repeatability, reproducibility and full documentation for audits.

Technologies

• Confocal: patented multi-pinhole design enables ultra-fast image capture and high signal quality for excellent repeatability down to the sub-nanometer range.
• White light interferometry: provides vertical resolution in the sub-nanometer range independent of magnification; ideal for ultra-smooth surfaces and precise step-height determination.
• Focus variation: active illumination and extended depth capture for geometry measurement of large, rough surfaces; capable of measuring steep surfaces (up to ~86°) and large vertical ranges in a single run.

Typical measuring tasks

• Roughness measurements according to ISO 21920 / ISO 4287 and ISO 13565 / ISO 25178.
• Topography and volume analysis, wear and tribology studies.
• Contour and form measurements in 2D and 3D.
• Pore and particle analysis, defect detection and surface inspection.

Product value

• Accurate, reproducible results: reliable raw data and profile accuracy for quality control and R&D.
• Automated high-resolution inspection: fast acquisition across large areas to increase throughput and cost-efficiency.
• Flexible configuration: modular components and optional sensors adapt to varied industrial applications.

Technical specifications

• Article number: 6350035
• Brand: Mahr
• Model: MarSurf3D MS GS Platform
• Series: MarSurf3D MS series
• Multisensor technologies: Confocal (multi-pinhole), White light interferometry, Focus variation with active lighting
• Confocal highlights: patented multi-pinhole, ultra-fast capture, sub-nanometer repeatability
• Interferometry highlights: vertical resolution in the sub-nanometer range; suited for ultra-precise step-height measurement
• Focus variation highlights: measures steep surfaces up to ~86° and large vertical ranges; optimized for large, rough surfaces
• Designed for large workpieces, option for additional point sensors and continuous 24/7 operation
• Applicable standards for roughness: ISO 21920, ISO 4287, ISO 13565, ISO 25178
• Typical applications: roughness, topography (volume/wear/tribology), contour/form (2D & 3D), pore/particle analysis, defect detection