Distance measurement interferometer interferoMETER 5400-DS

opticalcompactwhite light

Overview
The interferoMETER IMS5400-DS is a white-light interferometer for absolute distance and displacement measurement in industrial environments. The system combines nanometer-resolution absolute measurements with a relatively large offset distance and supports multipeak evaluation for transparent and multi-layer structures.

Key features

• Nanometer-precise absolute distance measurements, suitable for step-profile inspection
• Multi-peak distance measurement for transparent objects (up to 14 simultaneous distance values on MP models)
• Compact, robust sensors with options for 90° beam path
• High measuring rate up to 6 kHz for high-speed processes
• Robust controller with passive cooling and DIN-rail mounting option
• Easy configuration via web interface (no software installation required)
• Fiber-optic cable lengths up to 10 m for sensor/controller separation
• Flexible industrial integration and multiple I/O/interfaces

Functionality / Performance
The IMS5400-DS performs absolute distance measurements with nanometer resolution and supports multipeak evaluation to detect multiple reflective interfaces in transparent or layered samples. High acquisition rates (up to 6 kHz) and a small measurement spot (≈10 µm) enable stable measurements of step profiles and fine details in moving or stationary targets. The controller ensures stable operation via passive cooling and active temperature compensation while configuration is handled through a web-based interface for quick commissioning.

Technical specifications

• Measurement principle: white-light interferometry (absolute distance measurement)
• Resolution/accuracy: nanometer-range absolute measurements; typical linearity ±50 nm (model-dependent)
• Multi-peak capability: up to 13–14 simultaneous distance values (model-dependent)
• Measuring rate: up to 6 kHz
• Spot diameter: typically ≈10 µm
• Offset distance: relatively large for compact sensor design; 90° beam-path variants available
• Controller: robust metal housing, passive cooling, DIN-rail mountable; intelligent evaluation features
• Configuration: web interface (no client software required)
• Interfaces: Ethernet, EtherCAT, RS422, analog outputs, sync input, digital I/O, encoder input; PROFINET/EtherNet/IP via optional modules
• Sensor-controller separation: fiber-optic cables up to 10 m
• Typical applications: high-precision distance/displacement measurement, step-profile control, thickness measurement on glass, integration in inline production and cleanroom/vacuum environments (VAC/UHV variants available)