Semi-automatic probe station SPS series

Standard Semi-Automated Systems • Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option. • Stepper motor-based, no encoders. • Very cost competitive • Highly recommended in applications where sub-0°C testing or shielding is desired • Options available: heated or cooled chucks, zoom scopes or compound microscopes, various shielding, selection of the chucks for DC and RF measurements, and many more Specifications • Wafer Size Up to 200mm • Motor type Stepper motor • XY Stage Travel Up to 200mmx200mm • XY Stage Resolution motorized, 6.5μm repeatability • XY speed (max) 9.5mm/s • Z speed (max) 5mm/s • Platen Travel 12.7mm or more • Platen Adjustment Dual coarse and fine control with better than 2.5µm repeatability • Platen Planarity <12.7μm across 200mm • Platen Rigidity <50μm for 4.5kg • Vacuum Chuck Multi-zone vacuum • Chuck Flatness +/-13μm • Chuck Breakdown Voltage At least 500V • Chuck Isolation At least 1GΩ • Chuck Adjustment 360° coarse, +/-6° fine • Microscope High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X • Feedthrough Terminals BNC, Triax or Banana plug • System Dimensions 122cm wide x122cm deep x 92cm high