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...
Equipment upgrade options
- Semi-automatic multi-axis sample stage
- Fast probe-plane lifting function
- Upgradeable to a 4-inch wafer magnetic field probe
... Standard Semi-Automated Systems • Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option. • Stepper motor-based, no encoders. ...
Microxact
... The LCS-4000 Probe Station with Integrated Laser Cutting System gives the user maximum flexibility in semiconductor diagnostic cutting, failure analysis, trimming, marking and topside layer removal. All of these functions ...
Microxact
... load lock capabilities. The systems can be configured with individual probe arms (optionally with wedge probes) or with probe card holders. High density probing with >100 of DC probes ...
Microxact
... The SPS-2600-VAC and SPS-2800-VAC Series are MicroXact’s vacuum probe systems designed to support motorized or semi- automatic probing of up to 100mm or up to 200mm wafers in a vacuum or controlled gas ...
Microxact