High Accuracy Non-contact measuring system
• Provides ultra-high accuracy with a linearity of ±0,5 μm over the entire measuring range (0,05 mm to 10 mm) and ±(0,3+0,1ΔD) μm in the narrow range.
• Ultra-High repeatability of ±0,04 μm.
• High scanning rate of 3200 scans/s