Fixed-focus objective lens for surface inspectionfor metrology applicationsfor materials inspection
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Characteristics
- Type
- fixed-focus
- Technical applications
- for metrology applications, for semiconductor inspection, for materials inspection, for surface inspection, for production lines, surface roughness
- Other characteristics
- high-resolution, apochromat, compact design
- Focal length
4 mm
(0.16 in)
Description
Product overview
Technical specifications
Applications
Compatibility and mounting
- New design matching the WLI-Unit
- Ensures long working distance while remaining compact and lightweight (parfocal 60 mm)
- High numerical aperture (N.A. 0.50) for high resolution
- Plan apochromat optical correction
- Beam splitter and reference mirror integrated inside the objective
- Standard interference fringe adjustment mechanism
Technical specifications
- Model: WLI Plan APO 25x
- Magnification: 25x
- Numerical aperture (N.A.): 0.50
- Working distance (W.D.): 3.6 mm
- Focal distance (f): 4 mm
- Parfocal distance (P.D.): 60 mm
- Resolving power (R): 0.55 µm
- Applicable tube lens focal length: 100 mm
- Field of view (2/3" camera): 0.26×0.35 mm
- Field of view (WLI-Unit): 0.29×0.22 mm
- Glass compensation: No
- Spectral range: VIS
- Observation/Interferometer type: Interferometer
- Mirror tube length (excl. mounting screws): 57 mm
- Mounting screws: RMS / 20.32 mm ×36 TP
- Outermost diameter: 40 mm
- Mass: 290 g
Applications
- White-light interferometry and surface profilometry
- Surface roughness and step-height measurement
- Thin-film inspection and optical metrology in production lines
- Component inspection in semiconductor, precision engineering and materials testing
Compatibility and mounting
- Designed for use with a 100 mm tube lens
- Compatible with 2/3" camera formats and the WLI-Unit
- Mounting via RMS thread / 20.32 mm ×36 TP
- Spectral coverage in visible range (VIS)
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