Translation positioning stage E-HEX-90

rotarylinear motor-drivenhexapod

Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage It has ultra-fine positioning resolution and sufficient payload capability Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer. Application scenario of optical inspection, large hollow aperture adjustment optical path.