- Metrology - Laboratory
- Inspection and Monitoring
- Concentration monitoring system
- neoplas control GmbH
Concentration monitoring system Q-MACS MCprocessmeasurementoptical
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Characteristics
- Type
- concentration
- Applications
- measurement, process
- Technology
- infrared, optical
- Configuration
- portable
- Other characteristics
- online
Description
The Q-MACS Process MC is a portable monitoring system for the in situ online measurement of industrial processes such as etching, deposition and nitriding plasma processes. It is based on the proven Q-MACS Basic technology. This in situ measurement system uses infrared absorption spectroscopy to measure absolute molecular concentrations inside the process chamber. The optical connection to the process reactor is provided via standard vacuum flanges.
System with closed optical path
Equipped with 1 to 4 lasers
Sensitivity down to ppb range
Time resolution down to milliseconds
The Q-MACS Process MC includes all the equipment and software needed to operate the system.
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Q-MACS Process
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