Dimensions: -
L: 530mm W: 600mm H: 550mm
Weight: -
80 KG
Volume: -
18 Liter
Process chamber: -
aluminium, L: 250mm W: 290mm H:250mm
Microwave output: -
2,45 GHz / 50 - 1200 Watt
Inclusive: -
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional): -
aluminium, custom design possible
Vacuum connection: -
DN 25 ISO-KF
Venting: -
electromagnetic solenoid valve
Pump system: -
15-35 m³/h
Chamber door: -
hinged-type with viewing port