With automated door and adjustable work height for easier loading.
Dimensions: -
L: 1200mm W: 2700mm H: 1850mm
Weight: -
380 KG
Volume: -
235 Liter
Process chamber: -
L: 650 W: 650 H: 550
Microwave output: -
2,45 GHz / 1200 and 1450 Watt
Inclusive: -
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional): -
aluminium, custom design possible
Vacuum connection: -
DN 100 ISO-K
Venting: -
electromagnetic solenoid valve
Pump system: -
50 -600 m³/h process-dependent
Chamber door: -
Automatic door