Coating system AL series

the size of substrates or process speed needed. Dimensions: - L: 1050mm W: 800mm H: 2020mm Weight: - 195 KG Volume: - 140/160/300 Liter Process chamber: - aluminium, L: 400mm W: 480mm H: 520mm Microwave output: - 2,45 GHz / 50 - 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available Substrate holder (optional): - aluminium, custom design possible Vacuum connection: - DN 63 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - up to 250m³/h (integrated) Chamber door: - you can choose between hinged-type with viewing port, drawer door or universal door