Process automation system RTA-SRT-8000

Process : ● Apply to 125/156 size wafers ● Compatible to different sizes of tube PECVD equipment and plate PECVD equipment Features : ● Online dual-channel design shared by all AB ● Online integration of AOI and IV testing ● Incoming cell automatic detection and throwing function Linear motor quick pick and place function ● Stand-alone four-station platform ● High speed and high productivity ● High efficiency and low breakage rate ● Cell classification automatically ● Wafer ID tracking function ● stack automatically switch ● MES interface and remote diagnosis ● OEE statistics and energy consumption analysis Loading: online, offline ● Unloading: Stacked box ● Optional single/dual track design, whole/split layout Options： ● AOI front or back detection ● IV front or back detection, optional brand HALM or WAVELAB Cell classification number display and print function ● RFID tag identification function ● IGV intelligent docking function Advantage : ● High Accuracy (SMega Pixel Smart Camera Positioning Accuracy and Repeatability less than 1 Oum@3 cr High resolution linear motor ) ● High efficiency and low breakage rate(Uptime≥98.5% Breakage≤0.1 % ) ● High Throughput （Throughput:8000pcs/hour Cycle time≤0.9sec ） ● High Output （Output: 140,000 pcs/day 8000pcs/hourx98%x22=176000pcs/day） ● Intelligent shuttle robot arm （Multi-axis shuttle arm design, independent control Absolute encoder design Quick stack switch ）