- Robotics - Automation - Industrial IT
- Automation
- Process automation system
- RoboTechnik Intelligent Technology Co., Ltd.
Process automation system HIT
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Characteristics
- Options
- process
Description
Process :
● Adapt to M2 (156.75), M4 (161.75), G1 (158.75), M6 (166), M10 (182), M12 (210) and 230mm silicon wafers
● Compatible to different sizes of tube PECVD equipment and plate PECVD equipment Suitable for HJT process
Features :
● Loading and unloading: Cassette
● Output: graphite carrier box
● Optional PL test
● Clean room class 1000
● Carrier board automatic cleaning function
● Optional support MES function and remote diagnosis function
● Optional smart IGV interface
● Intelligent machine, OEE statistics and energy consumption analysis function
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.