3D profiler S lynx
surface roughnessshape measurementgeometry

3D profiler
3D profiler
3D profiler
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surface roughness, shape measurement, geometry
for industrial applications, for semiconductors, for the automotive industry
Other characteristics


Compact. Flexible. Powerful. S lynx is a new non-contact 3D surface profiler designed for use in industry and research. It has been designed as a compact and versatile system. S lynx is able to measure differing textures, structures, roughness and waviness, all across varying surface scales. The S lynx’s versatility makes it appropriate for a broad range of high-end surface measurement applications. Ideal performance is guaranteed by Sensofar’s proprietary 3-in-1 measurement technology, and complemented by the incredibly intuitive operation of the system with the associated SensoSCAN software. Applications - Automotive - Consumer electronics - Energy - LCD - Materials science - Microelectronics - Micromanufacturing - Micropaleontology - Optics - Tooling - Semiconductors - Watch manufacturing Confocal Confocal profilers have been developed for measuring smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution that can be achieved by an optical profiler. Thus, spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. High NA (0.95) and magnification (150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°). The proprietary confocal algorithms provide the unique vertical repeatability on the nanometer scale. Interferometry White-light vertical scanning interferometry (VSI) is a widely used and powerful technique for measuring surface characteristics such as topography or transparent film structure.


S lynx
S lynx
12 Pages
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