MEMS gyroscope ER-MG-067

single-axishigh-resolutionlow-noise

The ER-MG-067, a high performance MEMS Gyro with 0.3 deg/hr bias of instability and 0.125°/√h of angular random walk, is a single-axis MEMS angular rate sensor (gyroscope) capable of measuring angular velocity up to a maximum of ±400°/s with digital output compliant to SPI slave mode 3 protocol. Angular rate data is presented as a 24-bit word. The ER-MG-067 is intended for industrial, instrumentation, stabilization, and other high performance applications. An advanced, differential sensor design rejects the influence of linear acceleration, enabling ER-MG-067 to operate in exceedingly harsh environments where shock and vibration are present. The ER-MG-067 is available in a hermetically sealed ceramic LCC surface mount package, and is capable of operating at 5V supply and a wide temperature range (−45°C to +85°C). Features Proven and robust silicon MEMS gyro Up to ±400°/s measurement range 0.3°/hr bias instability 0.125°/√hr angular random walk Digital output (SPI slave) 5V operation (4.75~5.25V supply) Low power consumption (35 mA) High shock and vibration rejection Hermetically sealed ceramic LCC surface mount package (11x11x2mm) Integrated temperature sensor RoHS compliant