PVD deposition machine RTSP
PECVDsputteringion beam-assisted

PVD deposition machine
PVD deposition machine
PVD deposition machine
PVD deposition machine
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sputtering, ion beam-assisted
Deposition type
silicon thin-film, carbide
Other characteristics
vacuum, online
automotive, for photovoltaic applications, for photovoltaic modules, capacitor


The RTFCV machine is a batch model sputtering system, which can deposit various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonic products, aerospace and other new energy industries. Performances of the deposition films: To improve the conductivity of surface; High corrosion resistance; High wear resistance; High hardness Hydrophobic composition film and other functional films Available for compound coatings: metallic and non-metallic films. Film thickness range from 100nm to 12μm, thickness tolerance ±5% Strong adhesion. Low tempering parts surface hardening treatment. Type: Vertical orientation, octal structure, 2-doors (front and back) Design advantages: Environmentally friendly system, no industrial waste water, air and noise pollution; Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm. Up to 10 processing recipes login and backup; high repeatability and diversity. Special design of Carousel system for high uniformity of film deposition. High productivity and high quality Stable and reliable system, running 365 days * 24hrs (maintenance and repair breaking time) Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known European pump brands Compact design occupy minimum installation space. Contact us for more details. Royal Tech team is honored to serve you with our best service and knowleage.


*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.