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PECVD deposition machine PECVD
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Characteristics
- Method
- PECVD
Description
· Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.
· Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.
· Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.
· High-speed and stable integral module boat pushing mechanism.
· Auxiliary heating patent technology.
· Rapid coating technology.
· MES software & CCC system with independent intellectual property rights.
Other Shenzhen S.C New Energy Technology Corporation products
Horizontal Furnaces Series
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.