MULTI-AXIS SYSTEM WITH AIR BEARINGS
Product information of this special project with X-Y linear motor stage system with air bearings
Air-bearing 2 linear motor stage system:
Bearing: Air-bearin on X and Z axis
Basic structure : Ground steel
Peak force: X Axis: 16800N, Z Axis: 9840N
Measuring system:
-Repeatability: ± 0,5 μm
-Resolution : 100nm mit Safety
Max. Acceleration: 130 m/s2