Laser interferometer SP 5000 DI

OEM applicationsfor sub-nanometer displacement measurementfor length measurement

Our ultra-stable differential laser interferometer SP 5000 DI is characterized by a unique thermal stability and is therefore preferred for long-term measurements in research and development, e.g. for the analysis of material properties. In contrast to the standard interferometer, in the differential version the reference beam is led out of the sensor head and runs parallel to the measuring beam. This concept allows the sensor to be placed at a greater distance from the actual measurement location without significantly affecting the resolution or stability of the measurement. The length resolution of this interferometer is in the sub-nanometer range and, due to the differential principle, can be achieved at comparable measurement or beam lengths even under normal laboratory conditions. The measurement range for the length measurement can be several meters if tilt invariant reflectors are used for the measurements. The interferometric measuring system has a modular design and can thus be adapted to the respective measuring task. Adjustment is simple and, in particular, can be realized with long-term stability. The extension to an interferometric multi-axis system based on the SP 5000 DI interferometer allows simultaneous multi-coordinate measurements. minimization of environmental influences through differential measurement thermally long-term stable sensor, temperature sensitivity < 20 nm/K various optical reflectors can be used, e.g. spherical, plane mirror reflector large tilt invariance of the measuring reflector sensor head design in stainless steel as standard beam distance: 21 mm extensive trigger options