Calibration interferometer SP 5000 TR

OEM applicationsfor sub-picometer displacement measurementfor length measurement

Triple beam laser interferometric measuring system for simultaneous and accurate length, pitch and yaw angle measurements • flexible length measuring system of highest accuracy • easy handling and adjustment due to integrated beam direction detection • various optical reflectors can be used, e.g. spherical, plane mirror reflector • permissible tilting of the measuring reflector up to ± 12.5° • compact design • design of the sensor head optionally in aluminum, stainless steel or invar • beam distance: 12 mm • OEM versions, OEM software and vacuum version are possible • beam deflection with an optionally available adjustable deflection mirror • extended range of applications through optional interfaces • extensive trigger options • calibration software according to the currently valid standards Many application areas in industry and research require highly precise simultaneous displacement and angle measurements. The simultaneous acquisition of the pitch and yaw angles as well as the length measurement, during the movement of the carriage on which the triple reflector unit is fixed, makes it possible to evaluate motion axis quickly and with high precision. Fast and uncomplicated sensor adjustment is particularly important here. SP 5000 TR triple beam laser interferometers are precision length measuring instruments that combine three interferometers in one device. All three measuring channels are fed by one light source with the same highly stable laser frequency. Thus, three length values can be measured simultaneously with nanometer accuracy.