OEM applications interferometer SP 5000 DI/DS

for displacement measurementfor length measurementoptical

Description
The SP 5000 DI/DS combines a differential interferometer principle with a multi-beam interferometer to deliver simultaneous, highly stable length and interferometric angle (tilt) measurements. This configuration enables detection of ultra-small displacements and minute tilts over extended areas while reducing sensitivity to thermal and environmental disturbances.

Key features

• Four-beam laser interferometric displacement-angle differential measuring system
• Stable differential length and pitch (angle) measurements
• Designed for integration on XY stages and plane mirrors
• Beam distances: 15 mm (length measurement) and 6 mm (angle measurement)
• Extremely low temperature sensitivity < 20 nm / K
• OEM and vacuum versions available on request

Application and usage
The interferometer is intended for installation on plane mirrors or as a built-in measurement system; operation with reflectors is possible. Alignment is performed using ultra-stable optical components integrated into the beam path, ensuring repeatable and long-term stable measurements.

Areas of application

• Simultaneous measurement of length and angle to compensate Abbe error in precision measuring arrangements
• Position control of X–Y tables using two sensor heads for coordinated measurement
• Long-term stable length and angle measurements with highest resolution

Ideal for

• Long-term monitoring and calibration tasks
• OEM integration in precision systems
• Applications with highest stability and resolution requirements

Technical specifications

• Measuring range (length): 0 m to ≥ 2 m
• Length resolution: 5 pm
• Length measurement uncertainty: 0.15 µm/m
• Maximum tilt angle (with plane mirror): ±430 µrad
• Angle resolution: 0.02 µrad
• Beam distances: 15 mm (length), 6 mm (angle)
• Temperature sensitivity: < 20 nm / K
• Measuring principle: combination of differential interferometer and multi-beam interferometer for simultaneous length and angle measurement
• Versions: standard, OEM variants and vacuum versions (on request)