SIOS Meßtechnik length measurement interferometers

... Triple beam laser interferometric measuring system for simultaneous and accurate length, pitch and yaw angle measurements • flexible length measuring system of highest ...

... are essential for length measurement and calibration on guides, measuring, microscope and positioning stages, coordinate measuring machines and machine tools as well as for multi-coordinate measurements. ...

... the measurement. The length resolution of this interferometer is in the sub-nanometer range and, due to the differential principle, can be achieved at comparable measurement or beam lengths ...

... laser interferometer was specially designed for length measurements over long distances and builds consistently on the SP 5000 NG product family. The sensor head has additional optics that optimally adapt ...

... The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications in which highly stable length measurements must be implemented over long periods of time. The compact sensor ...

... independently of each other, differential measurements can be performed. For particularly high demands on the long-term stability of the differential measurement, we recommend the SP 5000 DI series interferometer. ...

... Laser interferometer for high-precision simultaneous measurement and calibration of length, pitch angle, yaw angle and straightness on positioning axes • flexible length measuring ...

... system