The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications in which highly stable length measurements must be implemented over long periods of time. The compact sensor design enables long-term stable adjustment and placement even in tight spaces, so that the precision measuring system is ideal as a laser scale for closed control loops. The application requires an external reference point, which is usually placed in the middle of the measuring range in order to achieve optimal measured value stability. The basic principle of the interferometer is based on the SP 5000 DI series and thus also achieves length resolutions in the sub-nanometer range. Measurements over several meters are easily possible, whereby the reflectors of the SP series can be used.
minimization of environmental influences through differential measurement
thermally ultra-stable sensor design, temperature sensitivity < 10 nm/K
various optical reflectors can be used, e.g. spherical, plane mirror reflector
large tilt invariance of the measuring reflector
compact and robust design
sensor head design in stainless steel as standard
Beam distance: 14 mm
OEM versions, OEM software and vacuum version are possible
can be used as a feedback system with optional interfaces
extensive trigger options