Ultra stable compact differential laser interferometer
• differential length or angle measurement of highest accuracy
• minimization of environmental influences through differential measurement
• thermally ultra-stable sensor design, temperature sensitivity < 10 nm/K
• various optical reflectors can be used, e.g. spherical, plane mirror reflector
• large tilt invariance of the measuring reflector
• compact and robust design
• sensor head design in stainless steel as standard
• Beam distance: 14 mm
• OEM versions, OEM software and vacuum version are possible
• can be used as a feedback system with optional interfaces
• extensive trigger options
The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications in which highly stable length measurements must be implemented over long periods of time. The compact sensor design enables long-term stable adjustment and placement even in tight spaces, so that the precision measuring system is ideal as a laser scale for closed control loops. The application requires an external reference point, which is usually placed in the middle of the measuring range in order to achieve optimal measured value stability. The basic principle of the interferometer is based on the SP 5000 DI series and thus also achieves length resolutions in the sub-nanometer range. Measurements over several meters are easily possible, whereby the reflectors of the SP series can be used.