Tripod positioning system 92-6DoF
6-axisXYXYZ

Tripod positioning system - 92-6DoF - SmarAct GmbH - 6-axis / XY / XYZ
Tripod positioning system - 92-6DoF - SmarAct GmbH - 6-axis / XY / XYZ
Tripod positioning system - 92-6DoF - SmarAct GmbH - 6-axis / XY / XYZ - image - 2
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Characteristics

Number of axes
XYZ, XY, 6-axis
Features
linear, rotary, tripod, piezo
Applications
vacuum
Other characteristics
precision
Repeatability

50 nm

Stroke

6 mm, 31 mm
(0.24 in, 1.22 in)

Description

The larger of the two TRIPOD 92-6DoF motion system has six degrees of freedom and uses SMARSLIDE high-precision piezo stages, being also fully compatible with the CLS-92 modular system. The central component of the TRIPOD 92-6DoF is the TRIPOD 92-Core parallel kinematic tip-tilt stage. Its design with three radially arranged towers allows a roll and pitch motion of the top plate with a total travel of 31° for Rx, 27° for Ry and a linear translation in the Z direction of 11 mm. On top of the TRIPOD 92-Core a SR-5714C rotation stage allows a unlimited rotation around the Z axis. The TRIPOD 92-Core is fully compatible with the CLS-92 modular system and is placed on a XY platform consisting of two CLS-92 linear translation stages. The bottom plate allows a direct mounting to a standard optical breadboard with a 25mm grid. Values for rotational travel are given for a pivot point at the surface of the top plate. The overall dimensions of the complete system may be larger for different poses. For more information, see the CAD model in the download area. The repeatability is measured about 20mm above the top plate of each system, over the full travel range and for a single degree of freedom at a time. Values may be better for shorter travel ranges.

Catalogs

Catalog 22
Catalog 22
182 Pages
CATALOG 2025
CATALOG 2025
192 Pages

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.