Pressure calibration control panel MP3

stainless steelmanualpneumatic

Pressure control panels for semiconductor gases from quality 6.0 Waste gas valve Manual (pneumatic) process gas (EMO-) valve Purge gas valve Check valve to prevent process gas from flowing back into the puge gas line Pre-filter Pressure regulator Burst disc Contact pressure gauge for burst disc monitoring Relief valve Filter for particle-free process gas supply Process gas line shut-off valve System (low pressure) vent valve Shut-off valve for leak test or vacuum test Vacuum connector All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE 100 % helium-leak-tested Assembly in cleanroom class 100/10