Gas pressure regulator E61-VCR

membranesingle-stagestainless steel

Design optimized for low flow restriction and thorough electropolishing of the internal surfaces Minimized internal volume for short purge times All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE or PVDF respectively Single-stage regulator Regulator can be evacuated Internal connectors for pressure gauges High control accuracy Metal-to-metal seal to atmosphere High surface quality All connectors UNF 9/16-18 (1/4” VCR-compatible) Simple outlet pressure limitation by handwheel 100 % helium-leak-tested Assembly in cleanroom class 100/10 Optional documentation acc. to SEMASPEC Models with tied diaphragm and/or without spring in the gas-wetted area (see page 3: models)