XYZ positioning system 782327:003.24

automaticfor wafer inspection and metrologyfor microscopy

MP63-3 Miniature XYZ Positioning System, cartesian Customizable: • very high resolution rates • ideal for limited construction spaces • load capacity up to 10 N • finer adjustment for applications due to a fine-thread spindle • long service lifetime and particularly precise motion via profiled rail bearing This miniaturized X-Y-Z system is ideal for positioning applications where space is limited. Combined with a fine thread spindle, the XYZ Stage achieves very high resolution values. At the same time, this high-precision positioning system offers a very good price/performance ratio. Specifications: - Standard component: MT63-DC - Travel: 25 mm - Repeatability: ± 0.8 - ± 3.8 µm (XYZ) - Positoning speed: 1.8 – 3.6 mm/s (XY) / 0.9 – 1.8 mm/s (Z) - Max. load: 10 N - Motor: DC-Motor, Profile Rail - Feedback: Motor-Encoder - Standard component: MT63-SM - Travel: 25 mm - Repeatability: ± 1 - ± 4 µm (XYZ) - Positoning speed: 1.3 – 2.6 mm/s (XYZ) - Max. load: 10 N - Motor: Stepper Motor, Profile Rail