Multi-axis positioning system 782300:056.26

2/3-axisautomaticfor the semiconductor industry

MP53-2-1 Miniature XY-Phi Positioning System Phi-XY System with Piezo Motor Small manipulator for xy movement and rotation. Linear travel is 10 mm and ± 5 degrees in rotation. Extremely high resolution in the range on nm through piezo drives. The rotation is being realized by a linear stage acting upon a rotary bearing by means of a flexible coupling. Fixed joint for aligning parts The three-axis system is intended for aligning parts and samples. As only small paths of a few millimetres or degrees are sufficient for such corrective movements, a rotary movement can be generated with a linear stage if it transmits its movement to an otherwise passive rotary stage by means of a solid-state joint. The advantage of such a solid-state joint is that it transfers the precision of the linear stage completely to the rotary stage. If the deflection remains below 5 degrees, the stiffness of this joint also remains sufficient to transmit movements in the nanometer range in the tensile and compressive directions. Specifications: - Standard system: MT53-PM (XYRz) - Travel: 10 mm - Repeatability: ± 0.4 – ± 0.7 µm (XY) / ± 0.001 - ± 0.002 µm (Rz) - Positoning speed: 5 – 10 mm/s (XY) / 5 – 20 mm/s (Rz) - Max. load: 5 N - Motor: Piezo Motor, Cross Roller Bearings - - Feedback: Linear Scale - Length x Width x Heigh: 121 x 85 x 76 mm