Vacuum-compatible stage KDT310 series

XYmotorized2-axis

• Vakuum: all ranges HV / UHV up to 10E-8 mbar • Lubrication liquid up to 10E-8 • Max. bakeout temperature: 100°C • Aperture in X with 90 x 90 mm, Y 150 x 150 mm The positioning system with aperture was combined from two linear stages to design a precise and heavy-duty XY stage for applications in high vacuum and ultra-high vacuum. Its concept with profile rail guides and high-precision ball screws enables outstanding precision with optimum use of the installation space. It can be easily combined with the DT155 rotary stage, resulting in a wide range of applications. Fields of application Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron