High-accuracy stage DT65

rotarymotorizedvacuum-compatible

• Vacuum: all ranges HV up to 10-8 mbar • Lubrication liquid up to 10-8 mbar • Max. Bakeout temperature: 100°C Optionally configurable: • Magnetic and low magnetic variants available • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Small, highly dynamic rotary stage The smallest vacuum rotation stage in the product portfolio impresses with its high dynamics and speed. In vacuum and low-magnetic design, the DT65 is perfectly suited for applications in demanding environments. It is therefore used in particular in research and development as well as in experimental physics. It can be combined into demanding multi-axis systems and can be easily controlled via our FMC 400/450 controllers. Fields of application Research and development, setup of multi-axis systems, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research