XZ-Phi system | X linear motor, ball screw | Z DC motor, cross roller | Phi torque motor
High-precision measuring system with liner axis and rotary stages
This X-Z-Phi multi-axis positioning system consists of high-precision and durable standard axes (PMT160-300-EDLM, MT130-50-DC, DT170-TM), which can be ideally combined for a high-precision measurement setup. For horizontal movements, the PMT160-300-EDLM enables the smallest step sizes in the sub-micrometer range in addition to high positioning speeds. To exploit the full accuracy of the linear scale, it lies in alignment with the distance to be measured (Abbé's comparator principle). The scale sits separately from the table radially in front of the rotary table at the height of the part to be measured.
Highly precise and reliable metrology
· Ideal for setting up your high-precision metrology systems
· Measuring system resolutions in the submicrometer range up to 0.1 µm / 0.0001°
· High precision repeatability up to 0.3 µm
· Finest rotational movements up to 0.001°
· Low maintenance with extremely long service life
Flexibly configurable:
· Different motor variants: DC motor, stepper motor, linear motor and nanomotion
· Immediate use with pre-configured controller incl. exemplary software
· Versions for clean room ISO 14644-1