Vacuum-compatible stage LA92-40-LM-L

linearmotorized1-axis

High Speed Linear Axis HV / UHV / EUV, 40 mm travel, 0.4 µm repeatability, up to 2 kg load Vacuum: all areas HV / UHV up to 10E-11 mbar Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar Max. Bakeout temperature: 120°C Optionally configurable: • Magnetic, low-magnetic and magnet-free versions available • Material selection and vacuum lubrication adapted to the application • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170) • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Fast horizontal and vertical positioning in UHV The linear axis is mainly used for scanning samples. It allows fast positioning with extremely high resolution in ultra-high vacuum, also in vertical direction. It has a very narrow design with internal motors. Application areas High resolution and fast scanning applications, micro assembly, semiconductor technology in ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection.