Linear stage LA80 series

motorized1-axishigh-accuracy

High speed linear stage HV / UHV / EUV, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Lifetime in the kilometer range despite dry lubrication • Max. Bakeout temperature: 120°C • Available as magnetic version Optionally configurable: • Optionally with and without measuring system • Material selection and vacuum lubrication adapted to the application • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170) • Individual adaptation to the installation situation in the chamber • Versions for clean room ISO 14644-1 (up to class 1 on request) • Optional with Controller FMC400/450 Long lifetime despite dry running This linear axis is used as a powerful component for multi-axis systems and for highly dynamic transfer systems. It enables fast positioning with extremely high resolution in ultra-high vacuum, even in the vertical direction. A ball screw ensures high stiffness and standstill stability at high speed. The system does not require liquid lubricants and still offers lifetime in the range of many kilometers. Fields of application High-precision transfer systems in ultra-high vacuum under extreme ultraviolet radiation, semiconductor fabrication, beam shaping for exposure processes, surface analysis and sensor positioning, mass spectrometry, OLED coating processes, layer thickness measurement and layer rate measurement, surface coating (sputtering, vapor deposition), beam exits, experimental setups, sensor arrays for investigations of samples close to their native state