Vacuum transmitter with combined piezo/Pirani sensor VSL

RS485EtherCAT

The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar. Overview VSL vacuum transducer with Piezo/Pirani multi sensor: - Integrated multi sensor system: Two piezo diaphragm sensors to monitor chamber pump-down and vent-up
; Pirani sensor measuring down to 10-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events - Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or PROFINET - Differential pressure output for precisely triggering door-open function - High accuracy, optimal resolution and excellent stability - Short response time of up to 40 ms - Stable readings due to optimized temperature compensation - Measurements independent of gas type above 20 mbar