Vacuum transmitter with combined piezo/Pirani sensor VSR

digitalRS485EtherCAT

Absolute pressure 1200 mbar to 1 x 10-4 mbar (=hPa), 900 Torr to 1 x 10-4 Torr The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range. An intelligent microprocessor control automatically regulates the optimum interaction of both vacuum sensors. Smartline stands for the use of state-of-the-art digital technology for convenient, safe and cost-effective process control. Your advantages - Wide measuring range thanks to piezo/Pirani combination sensor - High accuracy and optimum resolution across the entire measuring range - Excellent reproducibility and long-term stability - Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or PROFINET - Bluetooth adapter SLKBT enables wireless communication - Automatic baud rate detection 9.6 kBd to 115 kBd - Optionally with large, integrated LCD display with backlighting (VSR53DL, VSR54DL) - Two independent, potential-free relay switch points - Easily replaceable callibrated sensor heads Examples of applications - Loadlock chambers - Analysis technology - Coating systems - Vacuum furnaces - Leak tests - Operational control of backing pumps - Process engineering