MBE system GEN20™

The GEN20 ™ MBE system is well suited for use with materials research and pre-production environments applications. It comes with a configurable cryopanel, manipulator and monitoring equipment. Through its modular design structure, its is able to accommodate up to two growth modules. The structure provides either manual of automated wafer transfer options. It is manufactured with vertical source to substrates orientation. This is made possible through the 12 MBE source ports. An option to add e-beam technology is also included.