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... pharmaceutical packages and advanced sealed devices Optical emission spectroscopy for high sensitivity testing The Pfeiffer Vacuum AMI, with its optical emission spectroscopy is perfectly suited for pharmaceutical applications. Especially ...
Pfeiffer Vacuum+Fab Solutions
... The APA 302 is a unique in-line monitoring tool for advanced chip manufacturing in clean room environment. This innovative equipment measures the airborne molecular contamination (in short AMC) in a FOUP ...
Pfeiffer Vacuum+Fab Solutions
... The ADPC 302 is a unique in-process contamination management system for particle contamination monitoring in the semiconductor industry. Efficient particle monitoring Submicrometer particles can cause ...
Pfeiffer Vacuum+Fab Solutions
... The APR is a system with four stacked vacuum chambers for the decontamination of wafers and FOUPs, which is served from a reliable robot. All chambers are equipped with a vacuum pumping station, a gas ...
Pfeiffer Vacuum+Fab Solutions
... solution for clean room and equipment front end modules monitoring (EFEM). Airborne molecular contamination (AMC) in IC fabs is known as the major factor of yield loss. To control and ...
Pfeiffer Vacuum+Fab Solutions
... The Facility Monitoring Systems (FMS) for remote system monitoring can be configured to meet a wide spectrum of cleanroom management needs for various industries—including pharmaceutical ...