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Advantages of the in-line concept :
in-line-production from die- to wire-bonding
curing-time < 20 seconds
no warpage of substrates
no batch process necessary
no heat resistant magazines necessary
short quality control cycle
substrate temperature < 90° C possible
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The PCO2-14™ Polyimide Cure solution is a clean process oven designed for polyimide baking and curing applications. Many semiconductor manufacturing environments, front-end machines are adapted for polyimide curing. This costly process results in equipment typically not suitable for polyimide curing in terms of cleanliness, inert atmosphere capabilities, cycle time or data acquisition.
The PCO2-14™ optimizes the polyimide cure process for semiconductor wafer devices. It enables short cycle times and a consistent, reproducible cure process for all wafers in the product load by combining four essential characteristics in a single, compact design: clean process operation (Class 100 recirculated airflow), inert atmosphere capabilities (<20 ppm of oxygen), temperatures up to 350°C, and fast cycle times with +/- 1% temperature uniformity.
Like other Despatch thermal processing tools, the PCO2-14™ Polyimide Cure can be networked and controlled from a central location, minimizing the floor space required and further improving productivity. Atmosphere data can also be monitored and recorded throughout the cycle.
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Batch Drying curing Oven
Industrial tailor-made ovens from 1m³ to 200m³ designed to meet your process needs of insulation, temperature and power.
With a temperature range of 20°C up to 500°C these industrial ovens are suitable for all applications of preheating, drying, cooking, polymerization, curing, tempering, stabilization, cooling.
Very robust mechanically welded construction with continuous weld water-tight laboratory, meets all requirements for working in a solvent environment. The rate of air renewal is considered on a case by case basis to allow optimal evacuation of clearing solvent while meeting explosive standards.
Any type of heating following the available energy.
With or without gas exchanger, electric, battery-steam-water oil
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Continuous tunnel Oven for curing drying
The very capable research department of ELMETHERM has developed a wide variety of continuous process tunnels. Since each product requires a specific process, we offer a wide range of solutions for conveying, regulation and aerodynamics.
We work together to conceive the best computer-integrated material handling system to respond to your specific needs and involve all your thermal processing applications.
• Conveyor Belt (PTFE tape, metal, stainless steel mesh)
• Conveyor Chain (work, accumulation, specific supports)
• Continuous Belt (round, flat)
• Motorized roller conveyors, transfer by pilgrim-step system, push girder.
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Curing Towers, vertical curing ovens
We provide turnkey equipment for small spaces for your thermal applications from 40°C up to 350°C.
These tailor-made solutions will help you minimize floor space while providing excellent temperature uniformity, proven mechanics, low maintenance and easy access
TOWER OF STACKABLE TRAYS
This type of tower is extremely compact. By stacking trays it is possible to work at high temperatures without risk of blockages thanks to a simplified mechanization without using chains and possible risk of lengthening. All mechanical components are located outside the hot zone.
We offer facilities tailored to your product.
Loading and unloading at the same or different positions by robot, manipulator, conveyors or manual.
Heating by gas burner or electric resistance.
Possibility of having several temperature regulation zones in the same tower.
Integrated cooling in the tower
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Ovens
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Batch Drying curing Oven
Industrial tailor-made ovens from 1m³ to 200m³ designed to meet your process needs of insulation, temperature and power.
With a temperature range of 20°C up to 500°C these industrial ovens are suitable for all applications of preheating, drying, cooking, polymerization, curing, tempering, stabilization, cooling.
Very robust mechanically welded construction with continuous weld water-tight laboratory, meets all requirements for working in a solvent environment. The rate of air renewal is considered on a case by case basis to allow optimal evacuation of clearing solvent while meeting explosive standards.
Any type of heating following the available energy.
With or without gas exchanger, electric, battery-steam-water oil
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| ... products without technical information |
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